Description:

The Dektak 150 stylus profiler comes in the following configurations: The standard 2-D Dektak 150 system, which includes a two-axis, manual sample-positioning stage with 101.6 x 101.6 mm (4 x 4 inches) of X-Y translation, manual leveling, two-point programmable or cursor software leveling, and manual theta rotation. This standard stage accommodates samples up to 90 mm (3.54 inches) thick and performs long scans of 55 mm (2.16 inches). It provides ± 50.8 mm (2 inches) of X-Y translation as well as manual theta positioning. In addition to 50 mm (1.97 inch), 100 mm (3.94 inch), and 150 mm (5.90 inch) wafer alignment pins, the theta chuck provides three-point suspension for performing stress analysis.